Fabrication of Inorganic Structures by Au membrane based Lithography for Optical

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Important Dates

Conference:

Apr. 22-24, 2019

Full Paper Due: Mar. 18, 2019

Abstract Due: Mar. 18, 2019

Audience Registration Due:
Apr. 22, 2019

Presentations of The Spring World Congress on Engineering and Technology (SCET 2017)

● Fabrication of Inorganic Structures by Au membrane based Lithography for Optical
Author(s)
JinHyun Choi
Affiliation(s)
Department of Physics, Pukyong National University, Busan 48513, South Korea
KEYWORDS
Fabrication, Inorganic Structures, Au membrane, Lithography, Optical
ABSTRACT
In this study, fabrication of metal hydroxide structures is demonstrated by new strategy based on capillary force lithography (CFL) using polydimethylsiloxane (PDMS) stamp. In general, CFL method only allows polymer structures because target materials should be liquid phase to fill its mold by capillary force and to be solidified to form rigid structures. On the other hand, protruded aluminum hydroxide [Al2(OH)3] structures were available by stamping a KOH soaked PDMS stamp to an Au membrane coated on Al substrate. The shape of Al2(OH)3structures varies with experimental conditions such as reaction time, thickness of Al layer and shape of PDMS stamp. The Al2(OH)3/Au structures fabricated by the previously reported method can be used for optical applications such as metamaterials. The fabricated Al2(OH)3 structures can also be used as a template to generate PDMS with the smaller size patterns. This the 2nd PDMS replica can transfer its patterns to Au substrate; of which Au patterns with smaller features than size of the 1st PDMS can be generated.